Compositions and methods for rapidly removing overfilled...

Details Compositions and methods for rapidly removing overfilled... Compositions and methods for rapidly removing overfilled...

2004-11-10

2008-09-02

Webb, Gregory E (Department: 1796)

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

C438S693000, C510S175000, C252S079100

Reexamination Certificate

active

07419911

ABSTRACT:
This invention relates to compositions and methods for removing overfilled substrates, preferably at a relatively high removal rates. Advantageously, a composition according to the invention can contain an oxidizer, preferably a per-type oxidizer such as a peroxide, periodic acid, and peracetic acid, and may also optionally contain an abrasive.

REFERENCES:
patent: 4789674 (1988-12-01), Paioni
patent: 5279771 (1994-01-01), Lee
patent: 5334332 (1994-08-01), Lee
patent: 5399464 (1995-03-01), Lee
patent: 5417877 (1995-05-01), Ward
patent: 5482566 (1996-01-01), Lee
patent: 5489233 (1996-02-01), Cook et al.
patent: 5498565 (1996-03-01), Gocho et al.
patent: 5672577 (1997-09-01), Lee
patent: 5721173 (1998-02-01), Yano et al.
patent: 5891205 (1999-04-01), Picardi et al.
patent: 5902780 (1999-05-01), Lee
patent: 5911835 (1999-06-01), Lee et al.
patent: 5938505 (1999-08-01), Morrison et al.
patent: 5958794 (1999-09-01), Bruxvoort et al.
patent: 5981454 (1999-11-01), Small
patent: 5993686 (1999-11-01), Streinz et al.
patent: 6000411 (1999-12-01), Lee
patent: 6019806 (2000-02-01), Sees et al.
patent: 6063306 (2000-05-01), Kaufman et al.
patent: 6110881 (2000-08-01), Lee et al.
patent: 6117783 (2000-09-01), Small et al.
patent: 6121217 (2000-09-01), Lee
patent: 6140287 (2000-10-01), Lee
patent: 6156661 (2000-12-01), Small
patent: 6187730 (2001-02-01), Lee
patent: 6217416 (2001-04-01), Kaufman et al.
patent: 6221818 (2001-04-01), Lee
patent: 6235693 (2001-05-01), Cheng et al.
patent: 6242351 (2001-06-01), Li et al.
patent: 6242400 (2001-06-01), Lee
patent: 6248704 (2001-06-01), Small et al.
patent: 6251150 (2001-06-01), Small et al.
patent: 6276372 (2001-08-01), Lee
patent: 6315803 (2001-11-01), Ina et al.
patent: 6355075 (2002-03-01), Ina et al.
patent: 6367486 (2002-04-01), Lee et al.
patent: 6569349 (2003-05-01), Wang et al.
patent: 6620215 (2003-09-01), Li et al.
patent: 6692546 (2004-02-01), Ma et al.
patent: 6774041 (2004-08-01), Kondo et al.
patent: 6800218 (2004-10-01), Ma et al.
patent: 7029373 (2006-04-01), Ma et al.
patent: 7029508 (2006-04-01), Scott et al.
patent: 2001/0041507 (2001-11-01), Kaufman et al.
patent: 2002/0111024 (2002-08-01), Small et al.
patent: 2002/0173221 (2002-11-01), Li et al.
patent: 2003/0047539 (2003-03-01), Ma et al.
patent: 2003/0073386 (2003-04-01), Ma et al.
patent: 2003/0077985 (2003-04-01), Zhou et al.
patent: 2003/0079416 (2003-05-01), Ma et al.
patent: 2003/0136055 (2003-07-01), Li et al.
patent: 2003/0162398 (2003-08-01), Small et al.
patent: 2003/0164471 (2003-09-01), Small et al.
patent: 2005/0178742 (2005-08-01), Chelle et al.

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