Abrading – Abrading process – Glass or stone abrading
Patent
1996-02-28
1998-06-23
Rose, Robert A.
Abrading
Abrading process
Glass or stone abrading
51308, 106 3, 451 36, B24B 100
Patent
active
057696896
ABSTRACT:
A composition is provided, which is suitable for polishing SiO.sub.2, silicates, and silicon nitride, comprising an aquesous slurry of submicron SiO.sub.2 particles and a soluble inorganic salt or combination of soluble inorganic salts of total solution concentration below the critical coagulation concentration for the slurry, wherein the slurry pH is adjusted to within the range of about 9 to 10 by addition of a soluble amine or mixture of soluble amines. Optionally, the compositions of this invention may also comprise a polyhydric alcohol.
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Cook Lee Melbourne
Cossaboon David
Wang Jiun-Fang
Benson Kenneth A.
Rodel Inc.
Rose Robert A.
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