Radiation imagery chemistry: process – composition – or product th – Post imaging processing – Bleaching
Reexamination Certificate
2005-01-28
2008-08-12
Kelly, Cynthia H. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Post imaging processing
Bleaching
Reexamination Certificate
active
07410751
ABSTRACT:
Methods for carrying out lithography with a carbon dioxide development system are described. In some embodiments the methods involve preferential removal of a darkfield region; in other embodiments the methds involve preferential removal of a light field region. The carbon dioxide development systems include a quaternary ammonium salt, preferably a quaternary ammonium hydroxide, halide, or carbonate. Compositions for carrying out the methods are also described. The quaternary ammonium salts preferably contain at least one CO2-philic group, such as a siloxane-containing group or a fluorine-containing group.
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DeYoung James
Wagner Mark
Johnson Connie P
Kelly Cynthia H.
Micell Technologies, Inc.
Myers Bigel & Sibley & Sajovec
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