Compositions and method for forming doped A-site deficient thin-

Details Compositions and method for forming doped A-site deficient thin- Compositions and method for forming doped A-site deficient thin-

1997-03-28

2000-09-12

Speer, Timothy M.

Stock material or miscellaneous articles

Composite

Of inorganic material

428694T, 428702, 252 6251R, B32B 900, H01F 100

Patent

active

061175714

ABSTRACT:
A method of forming an A site deficient thin film manganate material on a substrate from corresponding precursor(s), comprising liquid delivery and flash vaporization thereof to yield a precursor vapor, and transporting the precursor vapor to a chemical vapor deposition reactor for formation of an A site deficient manganate thin film on a substrate. The invention also contemplates a device comprising an A site deficient manganate thin film, wherein the manganate layer is formed on the substrate by such a process and is of the formula La.sub.x M.sub.y MnO.sub.3, where M=Mg, Ca, Sr, or Ba, and (x+y)<1.0, and preferably from about 0.5 to about 0.99.

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