Composition to provide a layer with uniform etch...

Details Composition to provide a layer with uniform etch... Composition to provide a layer with uniform etch...

2007-10-16

2007-10-16

Wu, David W. (Department: 1713)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C526S319000, C438S738000, C438S712000, C412S026000

Reexamination Certificate

active

10919062

ABSTRACT:
The present invention includes a composition to form a layer on a substrate having uniform etch characteristics. To that end, the composition has a plurality of components, a subset of which has substantially similar rates of evaporation for an interval of time.

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