Composition sensor with minimal non-linear thermal gradients

Details Composition sensor with minimal non-linear thermal gradients Composition sensor with minimal non-linear thermal gradients

1986-08-28

1987-11-10

Robinson, Ellis P.

Electrical resistors

Resistance value responsive to a condition

Gas, vapor, or moisture absorbing or collecting

156647, 338292, 338293, 338319, 357 55, 428136, 428137, 428210, 428620, 428621, 428615, 428627, 428698, H01L 700, H01L 2906, B32B 310, B32B 1504

Patent

active

047060611

ABSTRACT:
A gaseous composition sensor which is a microstructure device comprising a heated planar thin film diaphragm sensor member suspended over a shallow flat bottomed etched pit in a single crystal silicon substrate.

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patent: 4412449 (1983-11-01), Eiermann et al.
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4511878 (1985-04-01), Shimada et al.
patent: 4548078 (1985-10-01), Bohrer et al.
patent: 4581928 (1986-04-01), Johnson
patent: 4600934 (1986-07-01), Aine et al.
Fabrication of Novel 3-D Microstructures by Anisotropic Etching of (100) & (110) Silicon, IEEE Transactions on Electron Devices, vol. ED-25, No. 10 (10/78), Ernest Bassous.

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