Composition, process, and apparatus, for removal of water and si

Details Composition, process, and apparatus, for removal of water and si Composition, process, and apparatus, for removal of water and si

1989-03-14

1991-10-15

Kyle, Deborah L.

Compositions

Humidostatic, water removive, bindive, or emissive

423210, 556466, 502415, 502152, 502157, 502407, 502402, C09K 300, C07F 708

Patent

active

050572423

ABSTRACT:
A scavenger composition having utility for removal of water and silicon mu-oxide impurities from chlorosilanes, such scavenger composition comprising:

REFERENCES:
patent: 29631 (1987-03-01), Tom
patent: 2902507 (1959-09-01), Hyde
patent: 4127598 (1978-11-01), McEntee
patent: 4297500 (1981-10-01), Finke et al.
patent: 4604270 (1986-08-01), Tom
patent: 4723967 (1988-02-01), Tom
patent: 4738693 (1988-04-01), Tom
patent: 4774347 (1988-09-01), Marko et al.

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