Composition for preparing porous dielectric thin film...

Details Composition for preparing porous dielectric thin film... Composition for preparing porous dielectric thin film...

2006-12-05

2006-12-05

Moore, Margaret G. (Department: 1712)

Compositions: coating or plastic

Coating or plastic compositions

Pore forming

C524S588000, C524S058000, C524S056000, C524S057000, C524S607000, C524S027000, C525S474000, C525S420000

Reexamination Certificate

active

07144453

ABSTRACT:
A composition for preparing a porous interlayer dielectric thin film which includes a saccharide or saccharide derivative, a thermo-stable organic or inorganic matrix precursor, and a solvent for dissolving the two solid components. Also provided is a dielectric thin film having evenly distributed nano-pores with a diameter of less than 50 Å, which is required for semiconductor devices.

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patent: 11-322992 (1998-05-01), None
patent: 2003/00786 (2003-06-01), None
Abstract JP 11-322992, May 1998.
English language abstract, TW 2003/00786 Jun. 16, 2003.

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