Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Cellular products or processes of preparing a cellular...
Reexamination Certificate
2007-12-18
2007-12-18
Zemel, Irina S. (Department: 1711)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Cellular products or processes of preparing a cellular...
C521S110000, C521S154000, C257S040000
Reexamination Certificate
active
10703374
ABSTRACT:
The present invention provides a composition for film formation which can form a porous film that excels in dielectric properties, adhesion, film consistency and mechanical strength, and that is easily thinned; a porous film and a method for forming the same, and a high-performing and highly reliable semiconductor device which contains the porous film inside. More specifically, the composition for forming a porous film comprises a solution containing an amorphous polymer which is obtained by hydrolyzing and condensing at least one silane compound expressed by the general formula (R1)nSi(OR2)4−n, and a zeolite sol which is formed by using a quaternary ammonium hydroxide. The method for forming a porous film comprises a coating step for coating the composition for forming a porous film; a subsequent drying step; and a porousness forming step.
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Nakagawa Hideo
Ogihara Tsutomu
Sasago Masaru
Yagihashi Fujio
Matsushita Electric Co., Ltd
Myers Bigel Sibley & Sajovec P.A.
Shin-Etsu Chemical Co. , Ltd.
Zemel Irina S.
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