Compositions – Electrically conductive or emissive compositions
Patent
1995-05-22
1996-10-01
Lieberman, Paul
Compositions
Electrically conductive or emissive compositions
528210, 528214, 528422, 528423, H01B 100, H01B 118
Patent
active
055608701
ABSTRACT:
A composition for forming an electrically conductive layer which is used in patterning of a resist with electric charge beam, which comprises:
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Maruyama Takashi
Nakamura Tomio
Saitoh Takashi
Shimizu Shigeru
Watanabe Keiji
Fujitsu Limited
Kopec M.
Lieberman Paul
Nitto Chemical Industry Co.
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