Composition for diffusing phosphorus

Details Composition for diffusing phosphorus Composition for diffusing phosphorus

1973-11-01

1976-01-06

Padgett, Benjamin R.

Compositions

Absorptive, or bindive, and chemically yieldive

148189, 252 623R, 252 635, 252500, 252950, 252951, 423302, H01B 302, H01L 21225, H01L 21223

Patent

active

039310396

ABSTRACT:
A phosphorus nitride-silicon oxide composition having good thermal stability and diffusion characteristics for use as a diffusant source of n-type impurities for a semi-conductor device.

REFERENCES:
patent: 3486951 (1969-12-01), Norby
patent: 3849344 (1974-11-01), McMurtry et al.

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