Composition for diffusing phosphorus

Details Composition for diffusing phosphorus Composition for diffusing phosphorus

1975-05-13

1976-08-03

Padgett, Benjamin R.

Compositions

Electrically conductive or emissive compositions

Metal compound containing

252184, 252950, 252500, 252951, 148189, H01B 108

Patent

active

039728382

ABSTRACT:
A phosphorus nitride-silicon oxide composition having good thermal stability and diffusion characteristics for use as a diffusant source of n-type impurities for a semi-conductor device.

REFERENCES:
patent: 3806382 (1974-04-01), Fitzgibbons et al.
patent: 3849344 (1974-11-01), McMurtry et al.

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