Composition for diffusing phosphorus

Details Composition for diffusing phosphorus Composition for diffusing phosphorus

1975-05-13

1977-05-24

Bentley, Stephen C.

Compositions

Electrically conductive or emissive compositions

252518, 252950, H01B 100, H01B 106

Patent

active

040254640

ABSTRACT:
A phosphorus nitride-silicon oxide composition having good thermal stability and diffusion characteristics for use as a diffusant source of n-type impurities for a semi-conductor device.

REFERENCES:
patent: 3849344 (1974-11-01), McMurtry
patent: 3852086 (1974-12-01), Murata
patent: 3931039 (1976-01-01), Yamashita
patent: 3931056 (1976-01-01), Myles

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