Abrasive tool making process – material – or composition – With synthetic resin
Reexamination Certificate
2006-05-02
2006-05-02
Marcheschi, Michael (Department: 1755)
Abrasive tool making process, material, or composition
With synthetic resin
C106S003000, C438S692000, C438S693000, C216S100000, C216S102000, C216S103000, C216S105000, C216S106000, C524S556000, C524S557000, C524S379000, C524S387000
Reexamination Certificate
active
07037350
ABSTRACT:
A composition for chemical-mechanical polishing, comprising an aqueous solution and an abrasive that comprises polymer particles, is described. The polymer particles carry an electrical charge, such that nearby particles repel one another. Accordingly, aggregation of polymer particles may be reduced, minimized or eliminated. The composition may additionally comprise an oxidizing agent. A method of using the composition to polish a substrate surface, such as a substrate surface having a metal surface feature or layer, is also described. A substrate so polished may exhibit good surface characteristics, such as a relatively smooth surface or a reduced number of, or a lack of, microscratches on the surface of the substrate.
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Chen Zhefei J.
Small Robert J.
DA NanoMaterials L.L.C.
Marcheschi Michael
Morgan & Lewis & Bockius, LLP
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