Composition for antireflection coating and method for...

Details Composition for antireflection coating and method for... Composition for antireflection coating and method for...

2008-04-29

2008-04-29

Smith, Duane (Department: 1797)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Processes of preparing a desired or intentional composition...

C430S271100, C430S270100, C430S910000, C430S327000, C524S238000, C524S319000, C524S165000, C526S206000, C526S214000, C526S225000, C526S236000

Reexamination Certificate

active

10519242

ABSTRACT:
An anti-reflective coating film is formed by applying on a chemically amplified photoresist film an anti-reflective coating composition comprising an alkali-soluble fluorine-containing polymer, an acid, an amine and a solvent capable of dissolving these components and having a pH of 7 or less. The formed anti-reflective coating film can serve to prevent multiple reflections within the photoresist film, increase the amount of reduction in thickness of the photoresist film upon development with a developer after exposure, and form a pattern having a rectangular cross-sectional pattern and not having T-top or round top.

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