Composition for anti-reflective coating on resist

Details Composition for anti-reflective coating on resist Composition for anti-reflective coating on resist

1996-03-18

1997-03-18

Brunsman, David

Compositions: coating or plastic

Coating or plastic compositions

O-containing organic compound

10628728, 4302731, 430325, C09D 532, C09D20104, G03L 500, G03L 173

Patent

active

056118503

ABSTRACT:
A composition for an anti-reflective coating on resist, which comprises a water-soluble fluorine compound and water as the main components, wherein the water-soluble fluorine compound contains (A) a water-soluble fluorine compound that is solid at 20.degree. C., 1 atmospheric pressure, and (B) a water-soluble fluorine compound that is liquid at 20.degree. C., 1 atmospheric pressure and that has a boiling point of at least 100.degree. C. under 1 atmospheric pressure.

REFERENCES:
patent: 4514537 (1985-04-01), Cavanaugh
patent: 5330883 (1994-07-01), Garza
patent: 5514526 (1996-05-01), Nishi et al.

Affiliated with

Also associated with

Rating

Composition for anti-reflective coating on resist does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Composition for anti-reflective coating on resist, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Composition for anti-reflective coating on resist will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1702803