Composition comprising rare-earth dielectric

Details Composition comprising rare-earth dielectric Composition comprising rare-earth dielectric

2005-10-19

2010-02-02

Speer, Timothy M (Department: 1794)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S699000, C428S700000

Reexamination Certificate

active

07655327

ABSTRACT:
Compositions comprising a single-phase rare-earth dielectric disposed on a substrate. Embodiments of the present invention provide the basis for high-K gate dielectrics in conventional integrated circuits and high-K buried dielectrics as part of a semiconductor-on-insulator wafer structure.

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