Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture
Patent
1989-01-10
1991-08-06
Johnston, Jill
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
55387, 55388, 422180, 502152, 502157, 502401, 502402, C07B 6302
Patent
active
050376241
ABSTRACT:
Scavenger compositions are disclosed, which have utility for effecting the sorptive removal of hazardous gases containing Group II-VII elements of the Periodic Table, such as are widely encountered in the manufacture of semiconducting materials and semiconductor devices. Gas sorption processes including the contacting of Group II-VII gaseous compounds with such scavenger compositions are likewise disclosed, together with critical space velocity contacting conditions pertaining thereto. Further described are gas contacting apparatus, including mesh structures which may be deployed in gas contacting vessels containing such scavenger compositions, to prevent solids from being introduced to or discharged from the contacting vessel in the gas stream undergoing treatment. A reticulate heat transfer structure also is disclosed, for dampening localized exothermic reaction fronts when gas mixtures comprising Group II-VII constituents are contacted with the scavenger compositions in bulk sorption contacting vessels according to the invention.
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K. Isseleib et al., "Alkali-Phosphorverbindugen und ihr Reactives Verhalten XXX Zur P-H--und As-H-Aciditat Primarer und Sekundarer Phosphine bzw. Arsine", J. Organomet. Chem. 3, pp. 84-91, 1965.
Luxon Bruce A.
McManus James V.
Tom Glenn M.
Advanced Technology & Materials Inc.
Hultquist Steven J.
Johnston Jill
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