Composition and slurry useful for metal CMP

Details Composition and slurry useful for metal CMP Composition and slurry useful for metal CMP

1996-11-26

1999-09-28

Raymond, Richard L.

Compositions

Oxidative bleachant, oxidant containing, or generative

216 53, 2521821, 25218232, 2521834, 510175, C09K 1300

Patent

active

059582880

ABSTRACT:
A chemical mechanical polishing composition comprising an oxidizing agent and at least one catalyst having multiple oxidation states, the composition being useful when combined with an abrasive or with an abrasive pad to remove metal layers from a substrate.

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