Compositions – Etching or brightening compositions
Reexamination Certificate
2005-02-01
2005-02-01
Chen, Kin-Chan (Department: 1765)
Compositions
Etching or brightening compositions
C438S745000
Reexamination Certificate
active
06849200
ABSTRACT:
A composition and process for wet stripping removal of sacrificial anti-reflective silicate material, e.g., from a substrate or article having such material deposited thereon, particularly where the sacrificial anti-reflective material is present with permanent silicate materials desired to be unaffected by the wet stripping composition.
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Baum Thomas H.
Bernhard David
Minsek David
Murphy Melissa
Advanced Technology & Materials Inc.
Chappuis Margaret
Chen Kin-Chan
Hultquist, Esq. Steven
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