Coating processes – Electrical product produced
Patent
1998-03-31
2000-11-21
Cameron, Erma
Coating processes
Electrical product produced
427226, 427245, 427387, B05D 302, B05D 512
Patent
active
061499668
ABSTRACT:
To provide a composition and process for forming insulating films that can produce insulating films having low dielectric constants. The composition comprises (A) an electrically insulating curable inorganic or organic resin, (B) a solvent, and (C) at least one solvent-soluble substance (excluding the solvent used for component (B)) that upon heating or by interaction with the resin (A) can generate gas or undergo volatilization in the temperature range from 0.degree. C. to 800.degree. C. The insulating films are prepared by coating the surface of a substrate the composition; evaporating the solvent; and subsequently heating the substrate in order to generate gas from component (C) during the course of or after the cure of the said resin (A).
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Pg. 116 of the 1995 Proceedings of the Twelfth International VLSI Multilevel Interconnected Conference, Jun. 1995.
Kobayashi Akihiko
Mine Katsutoshi
Nakamura Takashi
Sasaki Motoshi
Sawa Kiyotaka
Cameron Erma
Dow Corning Toray Silicone Co. Ltd.
Gobrogge Roger E.
Severance Sharon K.
Streu Rick D.
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