Composition and method for removing copper-compatible resist

Details Composition and method for removing copper-compatible resist Composition and method for removing copper-compatible resist

2008-06-10

2008-06-10

Webb, Gregory E (Department: 1796)

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

C134S001300

Reexamination Certificate

active

07384900

ABSTRACT:
A composition for removing a copper-compatible resist includes about 10 to 30% by weight of an amine compound solvent, the amine compound solvent including an alkanol amine, about 10 to 80% by weight of a glycol group solvent, about 9.5 to 80% by weight of a polar solvent, and about 0.5 to 10% by weight of a corrosion inhibitor.

REFERENCES:
patent: 5308745 (1994-05-01), Schwartzkopf
patent: 5795702 (1998-08-01), Tanabe et al.
patent: 6218087 (2001-04-01), Tanabe et al.
patent: 6524376 (2003-02-01), Aoki et al.
patent: 6773873 (2004-08-01), Seijo et al.
patent: 2001/0014534 (2001-08-01), Aoki et al.
patent: 2001/0021489 (2001-09-01), Wakiya et al.
patent: 2001/0034313 (2001-10-01), Honda et al.
patent: 2003/0130146 (2003-07-01), Egbe et al.
patent: 2003/0181344 (2003-09-01), Ikemoto et al.
patent: 2005/0176259 (2005-08-01), Yokoi et al.
patent: 06-061615 (1994-03-01), None
patent: 06-266119 (1994-09-01), None
patent: 2000-199971 (2000-07-01), None
patent: 2001-350276 (2001-12-01), None
patent: 2002-072505 (2002-03-01), None
patent: 2003-076037 (2003-03-01), None
patent: WO 01/14934 (2001-03-01), None

Affiliated with

Also associated with

Rating

Composition and method for removing copper-compatible resist does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Composition and method for removing copper-compatible resist, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Composition and method for removing copper-compatible resist will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2809630