Composition and method for polishing a composite of silica and s

Details Composition and method for polishing a composite of silica and s Composition and method for polishing a composite of silica and s

1998-05-01

2000-10-17

Powell, William

Compositions

Etching or brightening compositions

C09K 1300

Patent

active

061326372

ABSTRACT:
A composition is provided for polishing a composite comprised of silica and silicon nitride comprising: an aqueous medium, abrasive particles, a surfactant, and a compound which complexes with the silica and silicon nitride wherein the complexing agent has two or more functional groups each having a dissociable proton, the functional groups being the same or different.

REFERENCES:
patent: 4448634 (1984-05-01), Lampert
patent: 4526631 (1985-07-01), Silvestri et al.
patent: 4671851 (1987-06-01), Beyer et al.
patent: 4915710 (1990-04-01), Miyazaki et al.
patent: 5391258 (1995-02-01), Brancaleoni
patent: 5445996 (1995-08-01), Kodera et al.
patent: 5476606 (1995-12-01), Brancaleoni et al.
patent: 5502007 (1996-03-01), Murase
patent: 5733819 (1998-03-01), Kodama et al.
patent: 5756398 (1998-05-01), Wang et al.
patent: 5759917 (1998-06-01), Grover et al.
patent: 5858813 (1999-01-01), Scherfer et al.

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