Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
Reexamination Certificate
2003-10-31
2008-11-04
Barts, Samuel A (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Silicon containing
C427S255393
Reexamination Certificate
active
07446217
ABSTRACT:
This invention relates to silicon precursor compositions for forming silicon-containing films by low temperature (e.g., <300° C.) chemical vapor deposition processes for fabrication of ULSI devices and device structures. Such silicon precursor compositions comprise at least one disilane derivative compound that is fully substituted with alkylamino and/or dialkylamino functional groups.
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Baum Thomas H.
Hendrix Bryan
Roeder Jeffrey F.
Wang Ziyun
Xu Chongying
Advanced Technology & Materials Inc.
Barts Samuel A
Hultquist Steven J.
Intellectual Property / Technology Law
Reynolds Kelly K.
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