Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2006-04-18
2006-04-18
Meeks, Timothy (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S576000, C427S128000, C427S130000, C427S255310, C427S372200, C427S901000, C423S599000
Reexamination Certificate
active
07029724
ABSTRACT:
A method of forming an A site deficient thin film manganate material on a substrate from corresponding precursor(s), comprising liquid delivery and flash vaporization thereof to yield a precursor vapor, and transporting the precursor vapor to a chemical vapor deposition reactor for formation of an A site deficient manganate thin film on a substrate. The invention also contemplates a device comprising an A site deficient manganate thin film, wherein the manganate layer is formed on the substrate by such a process and is of the formula LaxMyMnO3, where M=Mg, Ca, Sr, or Ba, and (x+y)<1.0, and preferably from about 0.5 to about 0.99.
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Baum Thomas H.
Doubinina Galena
Studebaker Daniel
Advanced Technology & Materials Inc.
Chappuis Maggie
Fuierer Marianne
Fuierer Tristan A.
Markham Wesley D.
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