Composite ultrasound transducer and method for manufacturing a s

Communications – electrical: acoustic wave systems and devices – Signal transducers

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367155, 367157, 310322, 310334, 128 24AA, 12866203, H04R 1700

Patent

active

051649209

ABSTRACT:
A composite ultrasound transducer (array) contains piezoelectric ceramic transducer elements which radiate substantially in the longitudinal direction, and are embedded in a polymer matrix. The transducer elements have such a geometrical structure, and are arranged relative to each other, so that the development of oscillation modes perpendicular to the longitudinal direction of the transducer elements is suppressed. A method for manufacturing the composite ultrasound transducer includes the steps of filling a plastic form, having a "negative" of the desired shape of the transducer elements, with ceramic slurry, and pyrolyzing the plastic form after the slurry dries therein. The resulting voids between the hardened ceramic elements are filled with polymer to create the overall composite transducer. The transducer elements can thus be given an arbitrary shape and arrangement, such as hexagonal or irregular square structures, having a trapezoidal cross-section in planes parallel to the longitudinal axis of the transducer elements.

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"Fabrication of microstructures with high aspect rations and great structual heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)", E. W. Becker et al. Microelectronic Engineering 4 (1986) pp. 35-56.

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