Composite structure for manufacturing a microelectronic componen

Details Composite structure for manufacturing a microelectronic componen Composite structure for manufacturing a microelectronic componen

1996-11-18

1999-01-05

Turner, A. A.

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

427 96, 427 99, 427122, 427123, H01L 2912

Patent

active

058559540

ABSTRACT:
The invention provides a composite structure for microelectronic components having a self-supporting metal plate, an electrically insulating layer adhering to the metal plate, and a functional layer adhering to the insulating layer for the application of at least one microelectronic component. An at least largely monocrystalline information layer which covers the metal plate at points is applied to the self-supporting metal plate. The regions of the surface of the metal plate which are free of the information layer are provided with the insulating layer. When the surface of the information layer is exposed at least in regions, the functional layer is deposited on the insulating layer and on the exposed information layer. The crystal information required for an epitaxial deposition of the functional layer is taken from the information layer.

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"Growth of Textured Diamond Films on Foreign Substrates from Attached Seed Crystals," M.W. Geis, Appl. Phys. Lett. 5 (6), 7 Aug. 1989, pp. 550-552.

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