Composite stamper for imprint lithography

Details Composite stamper for imprint lithography Composite stamper for imprint lithography

2003-12-19

2009-12-15

Gupta, Yogendra (Department: 1791)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C264S296000, C425S125000

Reexamination Certificate

active

07632087

ABSTRACT:
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.

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