Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1976-09-17
1977-11-29
Mack, John H.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204192F, 29630E, C23C 1500
Patent
active
040604713
ABSTRACT:
A method for depositing a layer in which the concentration of constituent materials varies through its thickness employs a radio frequency sputtering apparatus. The deposition apparatus has a target composed of different component materials for the layer. The substrate is placed within the deposition apparatus and moved to various positions with respect to the target during the deposition.
REFERENCES:
patent: 3324019 (1967-06-01), Laegrid et al.
patent: 3460976 (1969-08-01), Allen
patent: 3864239 (1975-02-01), Fletcher et al.
patent: 3920533 (1975-11-01), Pompei
patent: 3945902 (1976-03-01), Hawrylo et al.
patent: 3945903 (1976-03-01), Svendor et al.
patent: 3985635 (1976-10-01), Adam et al.
Moss Herbert Irwin
Pinch Harry Louis
Bruestle Glenn H.
Haas George E.
Mack John H.
RCA Corporation
Weisstuch Aaron
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