Composite shape memory micro actuator

Details Composite shape memory micro actuator Composite shape memory micro actuator

1996-10-25

1998-10-20

Picard, Leo P.

Electricity: electrothermally or thermally actuated switches

Electrothermally actuated switches

With longitudinally expansible solid element

148402, 337140, H01H 3746, H01H 3748

Patent

active

058252754

ABSTRACT:
A micro-dimensioned shape memory alloy composite composed of a thin film of shape memory material and a substrate film. The substrate film does not require further processing and thus the composite can be used as a switch without removing any portion of the substrate on which the SMA is deposited. It is also shown that more effective switches can be manufactured by including as a component of the composite a stress compensating film.

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patent: 5344117 (1994-09-01), Trah et al.
"A Practical Microgripper by fine alignment, eutectic bonding and SMA actuation", Lee et al, Sensors and Actuators A, 54, Elsevier Science S.A., 1996, pp. 755-759.
"The Two-Way Effect in Homogeneous Alloys and Composites for Robotic Applications", Escher et al, Proceedings of the International Conference on Martensitic Transformations, 1992, Monterey Institute for Advanced Studies, Monterey, CA, USA, pp. 1289-1294.
"Thin Film Shape Memory Alloy Microactuators", Krulevitch et al, Journal of Microelectromechanical Systems, vol. 5, No. 4, Dec. 1996, pp. 270-282.

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