Composite sensor

Details Composite sensor Composite sensor

1997-05-13

1999-04-13

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7351432, 7350404, 361280, G01P 904, G01P 15125

Patent

active

058940910

ABSTRACT:
Fixed electrodes (A through F) are formed by means of a structural layer that has been provided on fixed bodies (7.sub.1 through 7.sub.4) of a silicon micro-machined substrate and a movable electrode (G) is formed by a movable body attached to fixed bodies (5.sub.1 through 5.sub.4) by flexible members (6.sub.1 through 6.sub.4). Variable capacitors of the parallel plate-type are formed by the movable electrode (G) and the fixed electrodes (A through F). When the movable electrode (G) has been vibrated, the Coriolis force incident to rotation or the force incident to acceleration are added to the movable electrode (G), with a result that the charge of the various variable capacitors change. By detecting the change in charge, both angular velocity and acceleration can be obtained. By providing another variable capacitor formed by a mass portion (H) by a movable body and the substrate, acceleration components in the directions of three axes can be detected.

REFERENCES:
patent: 5487305 (1996-01-01), Ristic et al.
patent: 5610334 (1997-03-01), Fima et al.

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