Optical: systems and elements – Light interference – Produced by coating or lamina
Patent
1999-02-24
2000-09-05
Chang, Audrey
Optical: systems and elements
Light interference
Produced by coating or lamina
359580, 359584, 359582, 359359, 428426, G02B 110, F21V 904, B32B 1706
Patent
active
061151793
ABSTRACT:
A composite optical film with a low refractive index mainly comprises calcium fluoride (CaF.sub.2), and silicon dioxide (SiO.sub.2) mixed with a specific composition ratio. The composite optical film is formed on a quartz substrate. The composite film is formed by using a coater, which accommodates two individual e-gun sources inside a cylindrical chamber. Oxygen is bled into the chamber. A heating process and plasma formation are performed to assist the process of forming the composite film. Additionally, a laser reflection lenses comprises an optical film with high refractive index and an optical film with low refractive index, which are alternately laminated onto a quartz glass substrate. The optical film with low refractive index uses a composite optical film mainly comprising calcium fluoride (CaF.sub.2) and silicon dioxide (SiO.sub.2) mixed with a fixed composition ratio.
REFERENCES:
patent: 4940636 (1990-07-01), Brock et al.
patent: 5460888 (1995-10-01), Hashimoto et al.
patent: 5891542 (1999-04-01), Tominaga et al.
Chu Cheng-Wei
Ho Fang-Chuan
Tsai Rung-Ywan
Wei Chao-Tsang
Chang Audrey
Industrial Technology Research Institute
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