Coherent light generators – Particular active media – Semiconductor
Patent
1997-09-18
2000-02-15
Bovernick, Rodney
Coherent light generators
Particular active media
Semiconductor
H01S 319
Patent
active
060261064
ABSTRACT:
A composite optical device having a high efficiency of coupling a laser diode and an optical device and a method of producing the composite optical device. The composite optical device connects a laser diode with a first mesa including an active layer on a (001) plane of a compound semiconductor substrate via a first cladding layer and an optical device provided with a second mesa including an optical waveguide layer formed on the (001) plane via a second cladding layer, wherein one end of the active layer and one end of the optical waveguide layer oppose each other at a distance smaller than the thicknesses of the first and second cladding layers. At least the second cladding layer is grown in an ambient supplemented with HCl to produce a planar surface.
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patent: 5825047 (1998-10-01), Ajisawa et al.
Nordell et al., "Improved InP Regrowth Properties In Metalorganic Vapor Phase Epitaxy By Addition of CCl.sub.4 ", Applied Physics Letters, vol. 61, No. 1, Jul. 1992, pp. 22-24.
Kimura Tatsuya
Suzuki Daisuke
Takiguchi Tohru
Bovernick Rodney
Leung Quyen Phan
Mitsubishi Denki & Kabushiki Kaisha
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