Composite movement table apparatus

Metal working – Plural diverse manufacturing apparatus including means for... – Attachment

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29846, 101407BP, 400 31, 409227, B23Q 500, B23C 1, B23C, B41F 1500

Patent

active

047395451

ABSTRACT:
By operating a Z direction position adjustment mechanism by a driving motor, a Z table movable in the X and Y directions can be moved in a Z direction while maintaining its horizontal condition. Vibrations caused in the Z table when the Z table is moved at a high speed in the X and Y directions are damped by vibration damping means provided between the Z table and a base bed fixed to a coarse adjustment table which is mounted on a base and driven in the X and Y directions. Improvement in the accuracy of positioning in the X and Y directions is achieved, as well as a vibration damping effect. A chuck holding member is formed on the table to hold a chuck by suction which in turn holds a mounted member by suction, thereby making the exchange of the chuck easy and preserving the parallelism of the upper surface of the chuck.

REFERENCES:
patent: Re29206 (1977-05-01), Jaffa
patent: 2200628 (1940-05-01), Lofstedt
patent: 3572680 (1971-03-01), Neff
patent: 3610148 (1971-10-01), Penaluna
patent: 3920233 (1975-11-01), Stuckert
patent: 3960072 (1976-06-01), Ahigren et al.
patent: 4561815 (1985-12-01), Trevarrow

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