Composite metal films and carbon nanotube fabrication

Details Composite metal films and carbon nanotube fabrication Composite metal films and carbon nanotube fabrication

2006-02-21

2009-12-22

Culbert, Roberts (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C977S742000

Reexamination Certificate

active

07635503

ABSTRACT:
Embodiments of the present invention provide methods for the fabrication of carbon nanotubes using composite metal films. A composite metal film is fabricated to provide uniform catalytic sites to facilitate the uniform growth of carbon nanotubes. Further embodiments provide embedded nanoparticles for carbon nanotube fabrication. Embodiments of the invention are capable of maintaining the integrity of the catalytic sites at temperatures used in carbon nanotube fabrication processes, 600 to 1100° C.

REFERENCES:
patent: 11139815 (1999-05-01), None
Hsu, Chih Ming et al.,“Growth of the large area horizontally-aligned carbon nanotubes by ECR-CVD”,Thin Solid Films 420-421 (2002), pp. 225-229.
Kitiyanan, B. et al., “Controlled production of single-wall carbon nanotubes by catalytic decomposition of CO on bimetallic Co-Mo catalysts”,Chemical Physics Letters 317(2000), Dated Feb. 4, 2000, pp. 497-503.
Zhang, Y. et al., “Imaging as-grown single-walled carbon nanotubes originated from isolated catalytic nanoparticles”, Appl. Phys. A 74 325-328 (2002) / Digital Object Identifier (DOI) 10.1007/s003390201274, Dated Mar. 4, 2002, pp. 325-328.
Zheng, L. X. et al., “Ultralong single-wall carbon nanotubes”, Nature Materials, vol. 3, Dated Oct. 2004, pp. 673-676.
Puurunen, Riikka L., “Growth Per Cycle in Atomic Layer Deposition: A Theoretical Model”, Chem. Vap. Deposition 2003, 9, No. 5, pp. 249-257.

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