Composite mechanical transducers and approaches therefor

Thermal measuring and testing – Temperature measurement – By a vibratory effect

Reexamination Certificate

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C374SE11011, C029S595000, C073S504160

Reexamination Certificate

active

07824098

ABSTRACT:
Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

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