Measuring and testing – Volume or rate of flow – Thermal type
Patent
1991-12-23
1994-05-24
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
053138325
ABSTRACT:
A mass air flow sensor (MAFS) is disclosed wherein silicon members carrying a resistive film are bonded to a glass substrate and extend out over an air flow opening through the glass substrate. The silicon members may be either bridges across the air flow opening or cantilevered beams having one end bonded to the substrate and a second free end. Silicon frames around the air flow opening can also be provided, to which an environmental seal can be formed. A novel method of making such sensors includes providing the glass substrate with the air flow opening therethrough and aligning thereover a silicon wafer selectively passivated to define the silicon member(s) and any frame element. The glass and silicon wafers are bonded and subsequently anisotropically etched, after which the resultant bonded and etched assembly can be employed in accordance with known mounting techniques.
REFERENCES:
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4594889 (1986-06-01), McCarthy
patent: 4677850 (1987-07-01), Miuro et al.
patent: 4771271 (1988-09-01), Zanini-Fisher
patent: 4808549 (1989-02-01), Mikkor et al.
patent: 4843445 (1989-06-01), Stemme
patent: 4870860 (1989-10-01), Ohta et al.
patent: 4930347 (1990-06-01), Henderson
patent: 4934190 (1990-06-01), Lee
patent: 5201221 (1993-04-01), Forgacs
Ford Motor Company Technical Report No. SR 89-160 Functional Behavior of a Batch-Fabricated Monolithic Silicon Mass Air Flow Sensor, C. H. Stephan, Jan. 23, 1990.
IEEE Publication No. 0018-9383/86/1000-1470$1.00 "A Monolithic Gas Flow Sensor with Polyimide as Thermal Insulator", Goran N. Stemme, IEEE Transactions on Electron Devices, vol. ED-33, No. 10, Oct. 1986.
Smith, R. L. et al, "An Integrated Sensor for Electrochemical Measurements," IEEE Transactions on Biomedical Engineering, vol. BME-33, Nos. 2, Feb., 1986, pp. 83-90.
C. H. Stephan and M. Zanini, A Micromachined, Silicon Mass-Air-Flow Sensor For Automotive Applications; (undated).
Stephan Craig H.
Zanini-Fisher Margherita
Ford Motor Company
Goldstein Herbert
Lippa Allan J.
May Roger L.
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