Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness
Patent
1983-09-20
1986-07-22
McCamish, Marion C.
Stock material or miscellaneous articles
Structurally defined web or sheet
Including variation in thickness
357 54, 357 71, 428164, 428213, 428215, 428448, 428472, 428698, 428699, 428702, B32B 302
Patent
active
046019391
ABSTRACT:
A composite insulator structure separating adjacent layers of patterned metal on an LSI chip is disclosed. The bottom layer of sputtered oxide is thicker than the top layer and is preferably planarized. The top layer is conformal plasma nitride so as to uncover unwanted projections on the underlying metal and prevent interlevel shorting between the patterned layers.
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Gati George S.
Lee Albert P.
Schwartz Geraldine C.
Standley Charles L.
Atkinson William M.
Haase Robert J.
International Business Machines - Corporation
McCamish Marion C.
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