Composite imaging mask

Details Composite imaging mask Composite imaging mask

1991-02-28

1992-06-02

Hannaher, Constantine

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

2502019, 356121, G02B 500

Patent

active

051189356

ABSTRACT:
A novel composite imaging mask suitable for employment in a method for simultaneously determining coarse and fine petal piston in a segmented imaging assembly. The mask comprises a transparent substrate comprising two spaced-apart apertures, which apertures are dedicated to coarse petal alignment; a first overlay deposited on a face of the substrate, for defining four phase retardation regions dedicated to fine petal alignment; a second overlay comprising an opaque coating, the second overlay deposited on the face of the substrate and complementary to the four phase retardation regions and the apertures, and a means for spirally separating the coarse and fine alignment entities.

REFERENCES:
patent: 4719343 (1988-01-01), Tressler, III
patent: 4725138 (1988-02-01), Wirth et al.
patent: 4750818 (1988-06-01), Cochran
patent: 4950878 (1990-08-01), Ulich et al.
patent: 5049734 (1991-09-01), Marino

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