Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1996-11-22
1997-10-14
Chilcot, Richard
Measuring and testing
Fluid pressure gauge
Diaphragm
338 4, 374143, G01L 906, G01L 122, G01K 108
Patent
active
056774931
ABSTRACT:
In a multiple function type differential pressure sensor including a semiconductor chip having a differential pressure detector for detecting a differential pressure, temperature detector for detecting a temperature, and static pressure detector for detecting a static pressure provided on a semiconductor substrate of a single chip, two or more pairs of differential pressure detectors means are incorporated, and a difference between outputs of the two or more pairs of differential pressure detectors is fetched out.
REFERENCES:
patent: 5259248 (1993-11-01), Ugai et al.
Nagasu Akira
Tobita Tomoyuki
Yamamoto Yoshimi
Chilcot Richard
Hitachi , Ltd.
Oen William L.
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