Composite backing plate for a sputtering target

Details Composite backing plate for a sputtering target Composite backing plate for a sputtering target

1996-02-29

1999-03-09

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429813, C23C 1434

Patent

active

058795243

ABSTRACT:
A composite backing plate (34) for a backing plate-target assembly (41) having a core of structural material (36) with a front face (42) and/or a rear face (44) of a different material laminated thereto. The composite backing plate (35) has the desired mechanical properties of a solid copper backing plate, for example, strength and stiffness, but is preferably less than half the density of a solid copper backing plate. The core material is preferably aluminum; the front face is preferably copper; and the rear face is preferably either copper or an organic material.

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patent: 5522535 (1996-06-01), Ivanov et al.
patent: 5593082 (1997-01-01), Ivanov et al.
patent: 5653856 (1997-08-01), Ivanov et al.

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