Composite article and method

Details Composite article and method Composite article and method

1992-01-21

1993-12-28

Robinson, Ellis P.

Stock material or miscellaneous articles

Composite

Of quartz or glass

428428, 428446, 428469, 428471, 428472, 501 53, B32B 1706

Patent

active

052738272

ABSTRACT:
A composite article comprising a silicon body and a glass body bonded directly thereto by electrostatic bonding. The glass composition consists essentially of oxides of silicon, aluminum, and lithium, and the glass has a coefficient of thermal expansion approximating that of silicon, etches at a rate of at least 100 mg/cm.sup.2 in 20 minutes in 48% HF, and may be electrostatically bonded to silicon at a voltage not over 1,000 volts/mm of glass thickness at a temperature not over 440.degree. C.

REFERENCES:
patent: 2920971 (1960-01-01), Stookey
patent: 3157522 (1964-11-01), Stookey
patent: 3397278 (1966-08-01), Pomerantz
patent: 3417459 (1968-12-01), Pomerantz
patent: 3589965 (1971-06-01), Wallis
patent: 3595719 (1971-07-01), Pomerantz
patent: 4018612 (1977-04-01), Chyung
patent: 5084328 (1992-01-01), Fine
"Field Assisted Glass-Metal Sealing", Wallis, G., Pomerantz, D.; J. Appl. Phys., 40, 10, (1969), 3946-49.
"Electrode Phenomena . . . Glass", Albaugh, K., J. Electrochem. Soc., 138, 10 (1991), 3089-94.

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