Composite aluminum plate and target for physical coating process

Details Composite aluminum plate and target for physical coating process Composite aluminum plate and target for physical coating process

1989-11-27

1991-07-16

Dean, R.

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

148415, 20429813, 428650, 428654, B32B 1500, C23C 1400, C22C 2100

Patent

active

050324683

ABSTRACT:
The present invention provides a composite aluminum plate suitable as a target for coating purposes, said plate comprising a surface layer melted on the basis of pure aluminum (Al.gtoreq.99.99), optionally consisting of a pure alloy, e.g., the members of which have a purity greater than or equal to 99.99%, melted on the basis of pure aluminum (Al.gtoreq.99.99); and (2) a supporting layer comprising a hardenable aluminum alloy having a Brinell hardness index HB of at least about 50 after being heat-treated under suitable conditions. This invention further provides a target suitable for physical or sputter coating processes, such as cathodic sputtering and magnetron sputtering. Methods for preparing such a plate and target are also provided.

REFERENCES:
patent: 2383511 (1945-08-01), Reynolds

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