Components of apparatus for film making and method for manufactu

Details Components of apparatus for film making and method for manufactu Components of apparatus for film making and method for manufactu

1997-01-08

1998-05-26

Silverberg, Sam

Coating apparatus

Gas or vapor deposition

428470, 4284721, 4284722, C25C 1450, C20C 1456

Patent

active

057558876

ABSTRACT:
Components of apparatus for film making and method for manufacturing the same include components made from aluminum alloy or aluminum without or with uneven surface of unenenness size of up to several mm, which are immersed in any one of sulfuric acid, phosphoric acid, oxalic acid, and chromic acid, and then washed and dried. Such components prevent the deposit of film forming materials on the components form peeling off during film making operation.

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