Component with a piezoelectric functional layer

Details Component with a piezoelectric functional layer Component with a piezoelectric functional layer

2004-02-06

2009-02-10

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S364000

Reexamination Certificate

active

07489067

ABSTRACT:
An electrical component includes a substrate, a first electrode layer, a structured growth layer that is thinner than the first electrode layer, a piezoelectric layer, and a second electrode layer. The growth layer is on the first electrode layer, the growth layer is structured relative to the first electrode layer, and the growth layer has a smaller surface area than the first electrode layer. The growth layer may be selected to support ordered growth relative to the piezoelectric layer.

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patent: 1 124 328 (2001-08-01), None
patent: 1 326 332 (2003-09-01), None
patent: WO02/23720 (2002-03-01), None

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