Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-02-14
2006-02-14
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C310S335000, C029S025350
Reexamination Certificate
active
06998940
ABSTRACT:
A component operating with bulk acoustic waves has a carrier substrate, a thin-film resonator and an acoustic mirror arranged between the resonator and carrier substrate. The acoustic mirror is formed by at least one high acoustic impedance layer, which is covered by a low acoustic impedance layer and the uppermost low impedance acoustic layer is planarized to form a flat planar surface on which the thin-film resonator is formed.
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EPCOS Inc.
Schiff & Hardin LLP
Summons Barbara
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