Component of glass-like carbon for CVD apparatus and process...

Details Component of glass-like carbon for CVD apparatus and process... Component of glass-like carbon for CVD apparatus and process...

2006-07-27

2009-02-03

Culbert, Roberts (Department: 1792)

Etching a substrate: processes

Mechanically shaping, deforming, or abrading of substrate

C264S029100, C216S053000, C216S056000

Reexamination Certificate

active

07485239

ABSTRACT:
Disclosed herein is an inner tube of glass-like carbon for CVD apparatus and a process for production thereof. The inner tube has its surface roughened without increase in metal impurities which cause particles. It has improved adhesion to CVD deposit film and also has a high degree of roundness. The surface roughness (on both the inner and outer surfaces) is 0.1-10 μm measured according to JIS B0601. The concentration of metal impurities (iron, copper, chromium, sodium, potassium, calcium, magnesium, and aluminum) in the surface is less than 50×1010atoms/cm2.

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