Component heater for use in semiconductor manufacturing equipmen

Details Component heater for use in semiconductor manufacturing equipmen Component heater for use in semiconductor manufacturing equipmen

1998-09-09

2000-06-20

Walberg, Teresa

Electric heating

Heating devices

With power supply and voltage or current regulation or...

219494, H05B 302

Patent

active

060780304

ABSTRACT:
A heating system and method used to maintain a fluid flowing through a component (such as a mass flow controller) within approximately a predetermined temperature range. The fluid flows through a cavity in the component. A heater element and a sensor are positioned within the body of the component and the heater element is coupled to a power source. The temperature sensor is electrically connected to a controller. The controller will receive an input indicative of the temperature, determine whether the input falls within a predetermined temperature range, and output a signal to the power source to adjust the power provided to the heater element as necessary in order to maintain the temperature within the predetermined temperature range.

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