Component for producing semiconductor devices and process of pro

Details Component for producing semiconductor devices and process of pro Component for producing semiconductor devices and process of pro

1988-09-01

1991-01-22

Ryan, Patrick

Stock material or miscellaneous articles

Hollow or container type article

428332, 428334, 428688, 428698, 428699, 428901, 156 89, 427 531, 427 96, B32B 300

Patent

active

049870165

ABSTRACT:
A component for producing semiconductor devices such as a tube, a boat or the like, comprising a component body made of a silicon carbide material, a silica layer formed on a surface of the body and a CVD coating layer of silicon carbide formed on the silica layer. The silica layer has a thickness ranging between 0.1 and 5 microns. The CVD coating layer has a thickness ranging between 50 to 1000 microns.

REFERENCES:
CA 111(4): 32246m; Component for producing semiconductor devices and process; Ohto et al.; 1989.

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