Component for electromagnetic waves and a method for...

Details Component for electromagnetic waves and a method for... Component for electromagnetic waves and a method for...

2007-03-20

2007-03-20

Hoang, Quoc (Department: 2818)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S753000, C257SE21221, C257SE21223

Reexamination Certificate

active

10500310

ABSTRACT:
The present invention relates to a method for fabricating a cavity in substrate for a component for electromagnetic waves, the method comprising providing said cavity by removal of material from said substrate by removal of material by immersing the substrate in a liquid bath of a chemical etchant, so that resultant cavity has a top and a bottom side and sidewalls, and said cavity at one of said top and/or bottom sides exhibits an at least a four sided opening having an opening with at least two different adjacent angles. The invention also relates to the component for microwave applications.

REFERENCES:
patent: 5821836 (1998-10-01), Katehi et al.
patent: 6362706 (2002-03-01), Song et al.
patent: 2002/0008078 (2002-01-01), Hatamura et al.
patent: 2004/0056560 (2004-03-01), Wang et al.

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